There's over a 100K parts, several of them from exclusive suppliers. You'd have to recreate several industries from scratch or somehow bribe all suppliers. You will absolutely fail to recreate the parts at all but even then if you hypothetically would, you can't put the machine together as if it's just a few bolts. It requires a team in the know months to do it, but you're not in the know. The tolerance for error is near-zero. Installing, configuring, running the machine, both hardware and software is extraordinarily complex.
None of this is a secret. The Chinese government announced a multi-billion dollar program to try and recreate such a machine from scratch. Expected timeline is 20 years with a highly uncertain outcome.
ASML does not have a concern to export to China, they want to export to China but are pressured to not do so by the US government.