Absolutely.
Even if you start with 32 bits, you often have polygons with many sides. In the worst case, you are modeling a "circle" and have to increase your precision to enough level to be accurate (please note that nobody in the right mind in VLSI would ever draw a "circle"--however, you wind up with an "implied" one due to DRC, more down below ...)
The problem is that line sweep intersection checks in DRC require approximately 3n+a couple bits to differentiate intersections that may be close to degenerate or have multple intersections near to each other. So, if you start with 32-bit numbers, you require approximately 96 bits plus a little for your intermediate calculations. (See: Hobby -- "Practical segment intersection with finite precision output" -- I'll let people find their own copy of the paper so HN doesn't splatter some poor site that I link)
You would think that doesn't matter since VLSI tends to limit itself to rectilinear and 45 degree angles. Unfortunately life isn't that simple.
If you take a simple rectangle and say "Nothing can be within distance x", you get a slightly larger rectangle parallel to the sides. Easy. The problem is that you also wind up with an implied quarter circle (told you this would come back) near each corner. Not so easy.
Put those circles such that they overlap only very slightly and you may have segments that are pretty close to tangent. Super not easy. Unfortunately, VLSI design often consists of putting those metals such that they are riiiight at the limit of spacing. Consequently, your super-not-easy case also becomes a very common case. Ouch.
Of course, you could just move the rectangle completely outward so that you have squares at the corners. However, that gives up a non-trivial amount of area that most places aren't willing to concede.
There is a reason why Siemens (nee Mentor) Calibre is so egregiously expensive.