Is there a reason to assume the ability to ramp up in WW2 has any bearing on the ability to ramp up an operation like ASML today?
You cannot just throw any bodies at a problem like creating ASML. You have to throw very specific bodies with each one having at least a decade or more of very specific expertise (it seems like, based on the comments and articles I have read). That is just ASML, not even getting into the deep expertise TSMC must need to execute, or even Apple in designing.
Knowledge itself has expanded tremendously since WW2 such that to be top of the field in WW2 required much less time than to be top of the field today.