The pure military stuff tends to be in the sensor space. DARPA has some projects to build much better accelerometers and gyros on ICs. They want cheap inertial navigation to back up GPS.
It's possible to reach much higher densities by writing an IC with an electron beam. This is slow, but useful for one-off jobs. DoD is known to be using that.[1] "DoD foundries make a wide variety of custom chips in small quantities - the exact opposite of commercial practice." Interestingly, the USAF is doing this partly because they don't trust off-the-shelf chips not to have "backdoors".